Abstract

A membrane mirror assembly is described that has a membrane deflected by a region of electrostatic actuators, consisting of conducting pads. The procedure for fabrication of typical membranes is described and involves evaporation of the material onto a substrate in a vacuum chamber. Parametric equations, developed from basic vibration theory, are given for establishing transient and steady-state performance criteria. Experimental data, using both titanium and nickel test membranes, shows that the performance satisfies the predicted requirements.

© 1977 Optical Society of America

Experimental studies of a deformable-mirror adaptive optical system*

J. E. Pearson and S. Hansen
J. Opt. Soc. Am. 67(3) 325-333 (1977)

Fabrication and measurement of low-stress membrane mirrors for adaptive optics

Peter Kurczynski, Harold M. Dyson, Bernard Sadoulet, J. Eric Bower, Warren Y.-C. Lai, William M. Mansfield, and J. Ashley Taylor
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Theory of multidither adaptive optical systems operating with zonal control of deformable mirrors

T. R. O’Meara
J. Opt. Soc. Am. 67(3) 318-325 (1977)

Push-pull membrane mirrors for adaptive optics

Stefano Bonora and Luca Poletto
Opt. Express 14(25) 11935-11944 (2006)

Membrane deformable mirror for adaptive optics: performance limits in visual optics

Enrique J. Fernández and Pablo Artal
Opt. Express 11(9) 1056-1069 (2003)