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Conferences > CLEOPR > 2013 > ThE3 > ThE3_6
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper ThE3_6

Surface Modification of Iron Thin Films Into Corrosion Resistant Property by F2 Laser

M. Okoshi, Y. Awaihara, T. Yamashita, and N. Inoue

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Abstract

A vacuum-UV F2 laser of 157 nm wavelength induced strong oxidation of Fe thin film surface to show the chemical resistance to pseudo seawater and HNO3 aqueous solution for selective metallization on silica glass substrate. The strong oxidation reactions on the surface and in the depth direction were confirmed by X-ray photoelectron spectroscopy. The corrosion resistance of the F2 laser irradiated samples was also supported by an electrochemical test. A fine pattern of the F2 laser irradiated Fe thin film was successfully formed after the HNO3 chemical etching.

© 2013 IEICE

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