Abstract
Confinement of optical energy to small dimensions can be achieved by coupling laser irradiation to near-field scanning optical microscopes (NSOMs). Since laser sources are available with different photon energies and pulse lengths, matching with the absorption properties of the substrate can be dictated, in order to accomplish local chemical and structural modification with precision, accuracy and without detrimental thermo-mechanical side effects. Nanoscale laser energy deposition has been shown to impart precise surface modification, even at levels sufficient for ablative material removal. The surface topography, texture, crystalline structure and chemical composition could be modified with lateral feature definition in the nanometer range by coupling nanosecond and femtosecond laser beams to NSOM probes in both apertured and apertureless configurations.
© 2007 IEEE
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