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High-Q Free-standing Silicon Nitride Micordisk Vertically Coupled with On-chip Waveguide

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Abstract

We designed and fabricated silicon nitride micordisk-waveguide vertical coupling devices processed at a low temperature of 270°. We experimentally demonstrate an intrinsic quality factor of 7.2×104 in the disk with only 15μm radius operating near 1310nm.

© 2014 Optical Society of America

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