Abstract

Micro-Fresnel lenses are important optical components for micro-optics. Their thin film structure and the ability to achieve very small focal lengths make it possible to integrate them with other optical devices. Both blazed and binary Fresnel micro lenses have been well studied and fabricated [1] [2]; however, the lens plane are confined on the surface of the substrate, which makes it difficult to use with other integrated optoelectronic components. In this paper, we report a vertical three-dimensional binary phase micro-Fresnel lens which can stand up straight on the substrate. Together with the beam splitters fabricated by similar method, we can build up a free space "micro-optical table" on a wafer, and use it as a link between optoelectronic devices, such as semiconductor lasers, isolators, optical fibers, and photodetectors.

© 1994 Optical Society of America