Specifications and Metrology of Surface Figure and Finish for Microlithography Optics

F. Zernike

JThA.1 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Aspheric Surface Generation Requirements in Magnetorheological Finishing

Don Golini, Yiyang Zhou, Steve Jacobs, Fuqian Yang, Dave Quesnel, Cheryl Gracewski, Mark Atwood, and Ed Fess

JThA.2 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Precision Asphere Fabrication and Metrology to Tolerances <1 nm RMS

Robert Kestner

JThA.3 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Limits in Aspheric Metrology

Chris J. Evans

JThB.1 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Phase Shifting Diffraction Interferometry for Measuring Extreme Ultraviolet Optics

Gary E. Sommargren

JThB.2 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Surface characterization of optics for EUV lithography

D. P. Gaines, K.W. DeLong, S.P. Vernon, D.G. Stearns, D.W. Sweeney, S.L. Baker, D. A. Tichenor, and R. Kestner

JThB.3 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Requirements for LIGO Optics and Their Realization

William P. Kells

JThB.4 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Phase Shifting Point Diffraction Interferometry of Lithographic Optics

Hector Medecki, David Attwood, Edita Tejnil, Kenneth A. Goldberg, Raul Beguiristain, and Jeffrey Bokor

JThB.5 Optical Fabrication and Testing (OF&T) 1996 View: PDF

The Economics of Traditional Versus CNC Lens Fabrication

Robert Wiederhold

OFA.1 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Surface Roughness Generation Mechanism of Ultraprecision Grinding with Cup-Typed Resinoid-Bonded Diamond Wheels

Y. Namba and M. Shiokawa

OFA.2 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Fracture and Plastic Flow in Grinding and Microgrinding

J. C. Lambropoulos, Tong Fang, and Su Xu

OFA.3 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Sapphire Grinding Study

Don Golini, John Lambropoulos, Mark Atwood, Maynard B. Smith, Fred Schmid, and Chandra Khattak

OFA.4 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Applied Grinding Wheel Performance Evaluation for Optical Fabrication*

Mark A. Piscotty, John S. Taylor, and Kenneth L. Blaedel

OFA.5 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Assessment of Microgrinding Tool Topography Using Optical Profilometry

Yi-Yang Zhou, David J. Quesnel, and Paul D. Funkenbusch

OFA.6 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Development of grinding wheels for optics

Joseph E. Picone

OFA.7 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Precision Lens Manufacturing in China

Walter Czajkowski and Jeremy Chang

OFB.1 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Experience with the rapidly renewable lap

C. J. Evans, R. E. Parks, D. J. Roderick, and B. A. Evans

OFB.2 Optical Fabrication and Testing (OF&T) 1996 View: PDF

New Developments in Bound Abrasive Polishing of Optical Glass on Opticam® Machining Centers

Birgit E. Gillman, Stephen D. Jacobs, Shane E. Snyder, and Mark A. Atwood

OFB.3 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Precision Flat Polishing Of Lithium Niobate

Jeffrey A Seckold

OFB.4 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Detection of Ring Tool Misalignment Using an Imaging Method

Tong Xie and John E. Greivenkamp

OFB.5 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Vertical Wheel Magnetorheological Finishing Machine for Flats, Convex, and Concave Surfaces

W.I. Kordonski, S.D. Jacobs, D. Golini, E. Fess, D. Strafford, J. Ruckman, and M. Bechtold

OFC.1 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Toward a Mechanical Mechanism for Material Removal in Magnetorheological Finishing

J. Lambropoulos, Fuqian Yang, and S.D. Jacobs

OFC.2 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Fabrication of Aspherical Ultraprecise Surfaces using a Tube (FAUST)

O.W. Fähnle, H. van Brug, C.J. van der Laan, and H.J. Frankena

OFC.3 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Innovative Optics for Giant Telescopes

H. M. Martin

OFD.1 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Null correctors for 6.5-m f/1.25 paraboloidal mirrors

J. H. Burge, D. Murgiuc, and S. C. West

OFD.2 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Fabrication of the 6.5 m Primary Mirror for the Multiple Mirror Telescope Conversion

D. A. Ketelsen, H. M. Martin, and J. H. Burge

OFD.3 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Optical polishing of the VLT 8.2m primary mirrors - A report

Roland Geyl and Jacques Paseri

OFD.4 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Fabrication of the 1.2 m Secondary Mirror for the Sloan Digital Sky Survey

B. K. Smith, J. H. Burge, and H. M. Martin

OFD.5 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Measurement of large convex aspheres

J. H. Burge

OFD.6 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Common Processes in the Polishing of Optical and Electronic Materials

Lee M. Cook

OThA.1 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Progress towards improving glass grindability: a glass chemistry approach

Kathleen A. Richardson, Jennifer McKinley, Alexis G. Clare, and Adam Ott

OThA.2 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Does Polishing Involve Fracture?

J. C. Lambropoulos

OThA.3 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Calculations of Relative Velocity in Abrasive Wear Systems Employing Laps of Constant Radius of Curvature

Norman J. Brown and John S. Taylor

OThB.1 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Adaptation of Traditional Grinding Force Models to Cylindrical Cup Grinding

Natarajan Venkataraman and Roger F. Gans

OThB.2 Optical Fabrication and Testing (OF&T) 1996 View: PDF

A Brief Survey of Pressure Calculations for Abrasive Wear Systems

Normal J. Brown and Lee M. Cook

OThB.3 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Technical Developments for the Next Decade of Optical Fabrication

Knut Holger Fiedler

OWA.1 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Market Evolution of the Optics Industry

Patrick Trotta

OWA.2 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Balancing cost with completeness: Specifying optics for the National Ignition Facility

D. M. Aikens and R. E. English

OWA.3 Optical Fabrication and Testing (OF&T) 1996 View: PDF

The Importance of Standards for the U.S. Optics Industry

Gene Kohlenberg

OWB.1 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Characterization of large aperture optical wavefronts using the Power Spectral Density function

C.R. Wolfe and J.K. Lawson

OWB.2 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Submicroradian slope repeatability with the LTP

Peter Z. Takacs and Cynthia J. Bresloff

OWB.3 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Sol-Gel Replicated Optics Made From Single Point Diamond Turned Masters Exhibit Fractal Surface Roughness

B.E. Bernacki, A.C. Miller, B.M. Evans, W.V. Moreshead, and J.-L. R. Noguès

OWB.4 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Aspheric Surface Metrology - Where Do We Go From Here?

John E. Greivenkamp and Andrew E. Lowman

OWC.1 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Absolute Ritchey-Common Test for Circular Flats

Robert E. Parks, Lianzhen Shao, and Chris Evans

OWC.2 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Grating interferometer for metrology of transparent flats

Peter de Groot

OWC.3 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Some Results from an Absolute Calibration for LIGO

Robert Bourgeois, Joann Magner, and H. Philip Stahl

OWC.4 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Interferometer for measuring polarization and birefringence

Peter de Groot and James Soobitsky

OWC.5 Optical Fabrication and Testing (OF&T) 1996 View: PDF

The Center for Optics Manufacturing

Harvey Pollicove

OWE.1 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Precision Interferometric Characterization to Accurately Test Aspheric Surfaces

Steven VanKerkhove and Paul Michaloski

OWF.1 Optical Fabrication and Testing (OF&T) 1996 View: PDF

FAUST: generation of conic surfaces

O.W. Fähnle, H. van Brug, C.J. van der Laan, and H.J. Frankena

OWF.2 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Magnetorheological Fluid Composition and Enhanced Material Removal Rates with Nanodiamonds

S. D. Jacobs, E. Fess, B. E. Gillman, H. Edwards, D. Golini, W. I. Kordonskri, V. W. Kordonski, I. Prokhorov, and Fuqian Yang

OWF.3 Optical Fabrication and Testing (OF&T) 1996 View: PDF

The role of sampling errors in the specification and testing of EUV mirror surfaces

E. L. Church and P. Z. Takacs

OWF.4 Optical Fabrication and Testing (OF&T) 1996 View: PDF

Image Degradation due to the Opticam Manufacturing Process

Anita Kotha and James E. Harvey

PDP.1 Optical Fabrication and Testing (OF&T) 1996 View: PDF