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Design of an optical linear-discriminant filter: optimization for enhancement of filter transmittance and discrimination accuracy

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Abstract

To discriminate fine concave and convex defects on a dielectric substrate, an optical machine learning system is proposed. This system comprises an optical linear-discriminant filter (OLDF) that performs linear discriminant analysis (LDA) of the scattered-wave distribution from target samples. However, the filter output from the OLDF is considerably weak and cannot be measured experimentally. Therefore, an algorithm is also proposed to improve the discrimination accuracy and filter transmittance. The designed filter is validated using a rigorous optical simulator based on vector diffraction theory. We also analyze and discuss a mechanism that provides high transmittance with high discrimination accuracy.

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Data availability

The data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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Figures (11)

Fig. 1.
Fig. 1. Optical system of the defect discrimination system. ${\rm S}$, sample with defect; ${{\rm L}_1}$, objective lens (focal length of ${{\rm F}_1}$); ${{\rm L}_2}$, imaging lens (focal length of ${{\rm F}_2}$); P, output plane on which the observation point exists.
Fig. 2.
Fig. 2. Geometric interpretation of the filter vector ${\boldsymbol v} \in {\mathbb{R}^2}$. The direction of ${\boldsymbol v}$ represents the weight vector (transmittance distribution of the OLDF) and the norm represents the threshold value. The dashed lines ${\rm D}$ and ${{\rm D}^\prime}$ are decision boundaries.
Fig. 3.
Fig. 3. Cross section of (a) concave and (b) convex defects.
Fig. 4.
Fig. 4. (a) ${f_1}$, (b) ${f_2}$, and (c) discrimination error for each iteration step for $\beta = 0$, 0.05, and 0.5.
Fig. 5.
Fig. 5. Discrimination error of the validation dataset.
Fig. 6.
Fig. 6. Irradiance distribution of the concave ($(d,h) = (0.5350\lambda , - 0.5656\lambda)$) and convex defects ($(d,h) = (0.5110\lambda ,0.4674\lambda)$) for the OLDF with (a) $\beta = 0$, (b) 0.05, and (c) 0.5.
Fig. 7.
Fig. 7. Irradiance distribution of the concave ($(d,h) = (0.5350\lambda , - 0.5656\lambda)$) and convex defects ($(d,h) = (0.5110\lambda ,0.4674\lambda)$) for the OLDF based on Fisher’s LDA.
Fig. 8.
Fig. 8. Relationship between the defect height and irradiance at (a) $\xi _{\rm o}^\prime $ and (b) $\xi _{\rm o}^\prime + 20\lambda$.
Fig. 9.
Fig. 9. Irradiance distribution of the concave ($(d,h) = (0.5350\lambda , - 0.5656\lambda)$) and convex defects ($(d,h) = (0.5110\lambda ,0.4674\lambda)$) for the SDF.
Fig. 10.
Fig. 10. Simple dataset of ${\boldsymbol x} \in {\mathbb{R}^2}$ and ideal decision boundary (dashed line) determined by Fisher’s LDA. The vector ${\boldsymbol v}$ is the filter vector corresponding to the ideal decision boundary.
Fig. 11.
Fig. 11. Filter vectors (blue arrows) and decision boundaries (dashed line) for (a) $\beta = 0$ and (b) $\beta = 0.5$. A white circle with a number $m$ represents ${{\boldsymbol v}_m}$.

Equations (23)

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C exp ( j k ξ F 2 ξ ) ,
f n ( ξ ) x n c n h n / 2 c n + h n / 2 C exp ( j k ξ F 2 ξ ) d ξ = C x n sin ( k h n 2 F 2 ξ ) k h n 2 F 2 ξ h n exp ( j k c n F 2 ξ ) ,
h n = Δ ξ π arcsin ( | w n | ) ( n = 1 , 2 , , N ) ,
c n = Δ ξ [ ( n N 2 ) arg ( w n ) 2 π ] ( n = 1 , 2 , , N ) ,
y ( ξ ) = n = 1 N f n ( ξ ) .
y o = n = 1 N f n ( 2 π F 2 k Δ ξ ) = n = 1 N w n x n .
x = [ x 1 , x 2 , , x N ] T ,
w = [ w 1 , w 2 , , w N ] T ,
w = v | v | ,
w 0 = | v | 2 .
f 1 ( v ) = n = 1 N A g A n ( v ) + n = 1 N B g B n ( v ) ,
g A n ( v ) = log { 1 + exp [ a ( | v T x A n | 2 | v | 2 | v | 2 ) ] } ,
g B n ( v ) = log { 1 + exp [ a ( | v T x B n | 2 | v | 2 | v | 2 ) ] } ,
f 2 ( v ) = 1 | v H x ¯ B ( s ) | 2 | x ¯ B ( s ) | 2 | v | 2 .
v m + 1 , i = v m , i α h m + 1 , i g i ,
h m + 1 , i = h m , i + | g i | 2 ,
g i = ( 1 β ) e e + f 2 f 1 v i + β f 2 e + f 2 f 2 v i .
e = N { x A n | | w H x A n | 2 < w 0 } + N { x B n | | w H x B n | 2 > w 0 } N { x A n } + N { x B n } ,
f 1 ( v ) v = n = 1 N A y A n ( v ) v + n = 1 N B y B n ( v ) v ,
y A n ( v ) v = 2 a 1 1 + exp [ a ( | v T x A n | 2 | v | 2 | v | 2 ) ] × ( v + | v T x A n | 2 | v | 4 v ( v T x A n ) | v | 2 x A n ) ,
y B n ( v ) v = 2 a 1 1 + exp [ a ( | v T x B n | 2 | v | 2 | v | 2 ) ] × ( v + | v T x B n | 2 | v | 4 v ( v T x B n ) | v | 2 x B n ) ,
f 2 ( v ) v = 2 ( v T x ¯ B ) | x ¯ B | 2 | v | 2 x ¯ B + 2 | v T x ¯ B | 2 | x ¯ B | 2 | v | 4 v .
v 0 = x ¯ B ( s ) H | x ¯ B ( s ) | x ¯ A + x ¯ B 2 x ¯ B ( s ) | x ¯ B ( s ) | .
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