Abstract
We present a systematic study of micro-trench resonators for heterogeneous integration with silicon waveguides. We experimentally and numerically demonstrate that the approach is compatible with a large variety of thin film materials and that it does not require specific etching recipe development, thus making it virtually universal. The microresonators are fabricated through in-foundry silicon-on-insulator processing and in-house backend processing. We also report ultra-compact chalcogenide microresonators with radius as small as 5µ and quality factors up to 1.8 × 105. We finally show a proof-of-concept of a novel multilayer waveguide using the micro-trench technique.
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