Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Wet-etching-assisted femtosecond laser holographic processing of a sapphire concave microlens array

Not Accessible

Your library or personal account may give you access

Abstract

We report rapid and mask-free fabrication of a sapphire concave microlens array by a combined method of femtosecond laser holographic processing and wet etching. The method features high fabrication efficiency, as crater arrays can be created on sapphire through a parallel processing manner, and the subsequent wet etching facilitates the formation of microlens arrays with a smooth surface. More importantly, the size and spacing of the concave microlenses can be well tuned by varying the distance of craters and etching time. Two types of microlens arrays with a spacing of 25 and 40 μm have been successfully fabricated, both of which showed good imaging performance. This method holds great promise for developing sapphire-based micro-optical components.

© 2018 Optical Society of America

Full Article  |  PDF Article
More Like This
Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method

Feng Chen, Hewei Liu, Qing Yang, Xianhua Wang, Cong Hou, Hao Bian, Weiwei Liang, Jinhai Si, and Xun Hou
Opt. Express 18(19) 20334-20343 (2010)

Versatile route to gapless microlens arrays using laser-tunable wet-etched curved surfaces

Bian Hao, Hewei Liu, Feng Chen, Qing Yang, Pubo Qu, Guangqing Du, Jinhai Si, Xianhua Wang, and Xun Hou
Opt. Express 20(12) 12939-12948 (2012)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (5)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved