High-performance thin-film optical filters with stress compensation

Thomas Begou; Fabien Lemarchand; Frédéric Lemarquis; Antonin Moreau; Julien Lumeau

doi:10.1364/JOSAA.36.00C113

Journal of the Optical Society of America A
Vol. 36,
Issue 11,
pp. C113-C121
(2019)
•https://doi.org/10.1364/JOSAA.36.00C113

High-performance thin-film optical filters with stress compensation

Thomas Begou, Fabien Lemarchand, Frédéric Lemarquis, Antonin Moreau, and Julien Lumeau

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Thomas Begou, Fabien Lemarchand, Frédéric Lemarquis, Antonin Moreau, and Julien Lumeau, "High-performance thin-film optical filters with stress compensation," J. Opt. Soc. Am. A 36, C113-C121 (2019)

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About this Article
History
- Original Manuscript: June 14, 2019
- Revised Manuscript: September 27, 2019
- Manuscript Accepted: October 2, 2019
- Published: October 29, 2019
Virtual Issues
JOSA A Feature Issue: Classical Optics in France (2019)

Abstract

We present a thorough description of high-performance thin-film optical filters with high flatness. These components can combine several tens or hundreds of layers and are manufactured using plasma-assisted reactive magnetron sputtering. Stress compensation is achieved using dual-side coatings with appropriate spectral function. Examples are described of highly reflecting mirrors at 515 nm with 15 nm flatness peak-to-valley up to and over 75 mm diameter aperture, narrow bandpass filters, and filters with broadband controlled transmission.

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Wavelength, nm	AOI, °	Reflection	Thickness, nm	Aperture, mm	Flatness PTV
515	22.5	$> 99.95 %$	10	30	$λ / 20$ ( $λ / 30$ over 80% aperture)
515	45	$> 99.95 %$	13	50.8	$λ / 20$ ( $λ / 30$ over 75% aperture)
515	15	$> 99.95 %$	19	76.2	$λ / 20$ ( $λ / 30$ over 60% aperture)
515	45	$> 99.95 %$	19	76.2	$λ / 20$ ( $λ / 30$ over 60% aperture)

Function	AOI, deg	Number of Layers	Total Thickness, nm
Mirror	15	33	2556.85
Mirror	22.5	33	2556.85
Mirror	45	37	3068.78
Antireflection coating	15	3	427.8
Antireflection coating	45	9	584.3

Mirrors at 15°
	$s$		$p$
	30°	15°	30°	15°
515 nm	99.998	99.996	99.987	99.993
532 nm	99.996	99.996	99.97	99.994
Mirrors at 22.5 $^{\circ}$
	$s$		$p$
	22.5	30	22.5	30
515 nm	99.998	99.997	99.992	99.987
532 nm	99.998	99.996	99.99	99.969
Mirrors at 45°
	$s$		$p$
	$45^{\circ}$		$45^{\circ}$
515 nm	99.99		99.98
532 nm	99.99		99.965

Number of Fabricated Mirrors		Rs	Rp
AOI = 15°
11	Mean	99.963	99.951
11	STDV	0.003	0.002
AOI = 22.5°
80	Mean	99.967	99.962
80	STDV	0.005	0.007
AOI = 45°
31	Mean	99.976	99.952
31	STDV	0.003	0.004

Front-Side Coating	Rear-Side Coating	Diameter	Number of Samples	Average Flatness	Standard Deviation Flatness
Mirror	Mirror	50 and 75 mm	26	19.4 nm	4.3 nm
Mirror	Antireflection coating	50 and 75 mm	16	18.9 mm	5.3 mm

Specifications	BPF1	BPF2
Substrate material	Fused silica	Fused silica
$H$ material	${H f O}_{2}$	${N b}_{2} O_{5}$
$L$ material	${S i O}_{2}$	${S i O}_{2}$
Number of layers front face	170	34
Number of layer rear face	92	58
Thickness front side, µm	11.4	3.4
Thickness rear side, µm	13.7	3.5

Coating	BPF1, FF	BPF1, RF	BPF2, FF	BPF2, RF
Number of monitoring glasses	6	3	1	4
Number of monitoring wavelengths	7	8	2	7

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Journal of the Optical Society of America A