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Femtosecond laser nanostructuring in porous glass with sub-50 nm feature sizes

Yang Liao, Yinglong Shen, Lingling Qiao, Danping Chen, Ya Cheng, Koji Sugioka, and Katsumi Midorikawa

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Abstract

We report on controllable production of nanostructures embedded in a porous glass by femtosecond laser direct writing. We show that a hollow nanovoid with a lateral size of ∼40  nm and an axial size of ∼1500  nm can be achieved by manipulating the peak intensity and polarization of the writing laser beam. Our finding enables applications ranging from direct construction of 3D nanofluidics in glass to clean stealth dicing of transparent plates.

© 2013 Optical Society of America

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