Abstract

Micro scanning mirrors play an important role in various optical applications for highly miniaturized, reliable and cost efficient scanning systems like compact laser projection displays, endoscopic and medical imaging systems or LIDAR 3D-cameras. We give an overview about different MEMS scanner technologies including bi-resonant, linear raster scanning and 2D-vectorial scanning systems. Finally we present examples of industrial applications including miniaturized FTIR-pectrometers, tunable laser sources, high power scanner for laser surgery and fast raster scanning devices for medical imaging.

© 2016 Optical Society of America