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  • Proceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011
  • (Optica Publishing Group, 2011),
  • paper C829

Widely Electro Thermal Tunable Bulk-Micromachined MEMS-VCSEL Operating around 850nm

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We present a tunable MEMS-VCSEL operating around 850 nm wavelength with the highest reported continuous tuning range of 37 nm achieved with semiconductor DBRs. The electro thermal tuning speed of the device reaches 700 Hz.

© 2011 AOS

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