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Comparison of Two-Temperature and Thermal Models for Prediction of the Optimal Femtosecond Laser-Material Processing of Silicon

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Abstract

A thermal and a two-temperature model (TTM) describing femtosecond laser-material interactions are compared. Both models accurately describe thermal response of silicon to multi-pulse irradiations, while the TTM distinguishes between thermal and non-thermal regimes.

© 2017 Optical Society of America

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