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Hybrid Si3N4-LiNbO3 integrated platform for electro-optic conversion

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Abstract

We demonstrate the integration of a Si3N4 Damascene photonic platform with thin-film lithium niobate on insulator (LNOI) via direct wafer bonding. This process enables fabrication of hybrid X(2)-X(3) microresonators with Q " 106, as well as integrated travelling wave EO modulators.

© 2020 The Author(s)

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More Like This
Nonlinear Frequency Conversion in the Hybrid Si3N4 - LiNbO3 Integrated Platform

Mikhail Churaev, Annina Riedhauser, Rui N. Wang, Charles Möhl, Viacheslav Snigirev, Simon Hönl, Terence Blésin, Daniele Caimi, Junqiu Liu, Youri Popoff, Paul Seidler, and Tobias J. Kippenberg
cd_4_3 The European Conference on Lasers and Electro-Optics (CLEO_Europe) 2021

Nonlinear Frequency Conversion in the Hybrid Silicon Nitride - Lithium Niobate Integrated Platform

Mikhail Churaev, Annina Riedhauser, Rui N. Wang, Charles Möhl, Viacheslav Snigirev, Simon Hönl, Terence Blésin, Daniele Caimi, Junqiu Liu, Youri Popoff, Paul Seidler, and Tobias J. Kippenberg
SM4B.1 CLEO: Science and Innovations (CLEO_SI) 2021

LiNbO3/Si3N4-Bilayer Vertical Coupler for Integrated Photonics

A. S. Alam, M. Girardi, A. Caut, A. Larsson, V. Torres-Company, M. Galili, Y. Ding, and K. Yvind
STu4J.7 CLEO: Science and Innovations (CLEO_SI) 2020

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