Low-concentration detection of CO2 using suspended silicon waveguides in the mid-IR

Pen-Sheng Lin; Arne Quellmalz; Po-Han Huang; Shayan Parhizkar; Shayan Parhizkar; Nour Negm; Nour Negm; Stephan Suckow; Floria Ottonello-Briano; Max C. Lemme; Max C. Lemme; Frank Niklaus; Kristinn B. Gylfason

doi:10.1364/CLEO_SI.2022.SF4O.1

Conference on Lasers and Electro-Optics
Technical Digest Series (Optica Publishing Group, 2022),
paper SF4O.1
•https://doi.org/10.1364/CLEO_SI.2022.SF4O.1

Low-concentration detection of CO₂ using suspended silicon waveguides in the mid-IR

Pen-Sheng Lin, Arne Quellmalz, Po-Han Huang, Shayan Parhizkar, Nour Negm, Stephan Suckow, Floria Ottonello-Briano, Max C. Lemme, Frank Niklaus, and Kristinn B. Gylfason

CLEO: Science and Innovations 2022

San Jose, California United States
15–20 May 2022
ISBN: 978-1-957171-05-0

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Optical Methods for Chemical Sensing (SF4O)

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P. Lin, A. Quellmalz, P. Huang, S. Parhizkar, N. Negm, S. Suckow, F. Ottonello-Briano, M. C. Lemme, F. Niklaus, and K. B. Gylfason, "Low-concentration detection of CO2 using suspended silicon waveguides in the mid-IR," in Conference on Lasers and Electro-Optics, Technical Digest Series (Optica Publishing Group, 2022), paper SF4O.1.

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Abstract

We show detection of CO₂ concentrations as low as 500 ppm using a suspended silicon photonic mid-IR waveguide. The performance is enabled by the low propagation loss (2.35 ± 0.25) dB/cm permitting sensing with waveguides up to 7 cm in length.

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