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A Hybrid Opto-Mechanical Micro-Disk Inertia Sensor

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Abstract

We numerically present optically enabled micro-disk inertia sensor. It consists of a disk-shaped proof mass integrated on top of an optical waveguide. It exhibits a sensitivity of 12dB/µm displacement and a dynamic range of 1g-10g.

© 2015 Optical Society of America

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More Like This
Opto-mechanical oscillations in a double-disk microcavity

Q. Lin, X. Jiang, M. Eichenfield, R. Camacho, P. Herring, K. Vahala, and O. Painter
CMKK1 Conference on Lasers and Electro-Optics (CLEO) 2009

An Opto-Electro-Mechanical Phase Shifter

M.W. Pruessner, D. Park, T.H. Stievater, D.A. Kozak, and W.S. Rabinovich
STu1F.5 CLEO: Science and Innovations (CLEO_SI) 2015

A Micro-Opto-Electro-Mechanical Grating 1D-OPA

Marcel W. Pruessner, Rita Mahon, Dmitry A. Kozak, Nathan F. Tyndall, William S. Rabinovich, and Todd H. Stievater
IM1B.7 Integrated Photonics Research, Silicon and Nanophotonics (IPRSN) 2021

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