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Real-Time Characterization and Optimization of E-Beam Evaporated Optical Coatings

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A system for on-line characterization and reoptimization of evaporated hafnia/silica coatings has been developed, incorporating inhomogeneity of evaporated films and changes in properties between vacuum and air. Tests verify the capability of improving manufactured coatings.

© 2001 Optical Society of America

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