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Optical Properties of Ion Beam Sputtered Oxide Mixture Coatings

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Mixture thin films with different ratios are produced by ion beam sputtering. The refractive index is correlated with the composition determined by energy dispersive X-ray spectroscopy. Experimental results for HfO2/Al2O3, Ta2O5/SiO2 and Al2O3/SiO2 mixtures are presented.

© 2010 Optical Society of America

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