Abstract

A multiple scale model named virtual coater is applied to investigate in the layer properties of growing films in dependence of PVD process conditions. Results for density, roughness, stress, and index of refraction are presented.

© 2016 Optical Society of America

PDF Article
More Like This
UV-Optical and microstructural properties of MgF2- and LaF3-coatings deposited by IBS and PVD processes

Detlev Ristau, Stefan Günster, Salvador Bosch, Angela Duparré, Enrico Masetti, Josep Ferré-Borrull, George Kiriakidis, Francesca Peiró, Etienne Quesnel, and Alexander Tikhonravov
ThA5 Optical Interference Coatings (OIC) 2001

Modeling of Al2O3 Thin Film Growth in Modern Ion Coating Processes

M. Turowski, H. Ehlers, K. Heinrich, and D. Ristau
MA.8 Optical Interference Coatings (OIC) 2013

Modeling and simulation of reactive magnetron co-sputtering for mixed oxide coatings

Neil R. Murphy, Lirong Sun, and John T. Grant
WB.6 Optical Interference Coatings (OIC) 2016

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Poster Presentation

Media 1: PDF (8937 KB)