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Conferences > OIC > 2016 > WB > WB.4

Multiple Scale Modeling of PVD Sputter Processes

M. Turowski, M. Jupé, T. Melzig, A. Pflug, A. Demircan, and D. Ristau

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Abstract

A multiple scale model named virtual coater is applied to investigate in the layer properties of growing films in dependence of PVD process conditions. Results for density, roughness, stress, and index of refraction are presented.

© 2016 Optical Society of America

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