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Conferences > OIC > 2019 > ThB > ThB.3

Design and Fabrication of Single, Smooth and Broadband Chirped Mirrors with a Top Nano-Porous Layer

Penghui Ma, Adriana Szeghalmi, Ulrike Schulz, Friedrich Rickelt, Vivek Beladiya, Peter Zimmermann, and Li Li

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Abstract

The design and fabrication results of single, low-ripples and broadband chirped mirrors with an integrated nano-porous layer using two different processes, atomic layer deposition and plasma etching, will be presented.

© 2019 The Author(s)

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