Abstract

A 222 nm all-solid-state far-ultraviolet C (UVC) pulse laser system based on an optical parametric oscillator (OPO) and second-harmonic generation (SHG) using β-Ba₂BO₄ (BBO) crystals was demonstrated. Pumped by a Nd:Y₃Al₅O₁₂ laser with a repetition rate of 100 Hz at 355 nm, the maximum signal laser pulse energy of 1.22 mJ at 444 nm wavelength was obtained from the BBO-OPO system, corresponding to a conversion efficiency of 27.9%. The maximum output pulse energy of 164.9 µJ at the 222 nm wavelength was successfully achieved, corresponding to an SHG conversion efficiency of 16.2%. Moreover, the tunable output wavelength of UVC light from 210 nm to 252.5 nm was achieved.

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