Abstract
Zr-Al co-doped ZnO (AZZO) were prepared by DC magnetron sputtering on glass slide substrates. Microstructure, Electrical and optical properties of AZZO thin films were investigated. The AZZO films with an electrical resistivity as low as 1.07×10−3Ωcm and an average optical transmission of 88.5% in the visible range were obtained at DC power of 170 W. The optical bandgap was in the range of 3.48-3.57 eV.
© 2009 OSA, IEEE Photonics Society, SPIE, COS, CIC
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