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Application of nanosphere lithography to the fabrication of nanorod LEDs and to the performance enhancement of conventional LEDs

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Abstract

The process of nanosphere lithography was developed and applied to LED epistructure. We demonstrated p-i-n nanorod LED arrays with some specific characteristics. Moreover, LEDs encompassed with self-aligned nanorods are fabricated. Light diffraction behaviors are characterized. The results are explained by photonic crystal effect.

© 2009 OSA, IEEE Photonics Society, SPIE, COS, CIC

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