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A Compact Integrated Spectrometer Based on SU-8 Polymer Using Echelle Diffraction Grating

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Abstract

A compact echelle diffraction grating spectrometer based on SU-8 polymer waveguides is designed and simulated. This EDG spectrometer has a size of only 6mm × 11mm, and can be fabricated by using photolithography process without additional etching process. The spectral resolution is 0.25 nm.

© 2013 Optical Society of America

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