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Conferences > ACPC > 2014 > ATh3A > ATh3A.48

Research of high performance Ge/Si avalanche photodiodes for single-photon detection

Chong Li, Chunlai Xue, Xia Guo, and Zhi Liu

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Abstract

A separate-absorption-charge-multiplication Ge/Si avalanche photodiode was designed. The devices have high dark current at low reverse bias, because of surface impurity and rough sidewall. A guard-ring structure and in-situ doping was introduced to decrease leakage-current.

© 2014 Optical Society of America

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