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Low polarization-dependent-loss silicon photonic trident edge coupler fabricated by 248 nm optical lithography

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Abstract

Trident edge couplers were fabricated using optical lithography. TE and TM coupling loss with lensed fiber were improved by 0.2 dB and 0.3 dB compared to a single-taper coupler. PDL was improved by 0.1 dB.

© 2015 Optical Society of America

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