Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > ACPC > 2015 > ASu3A > ASu3A.4

Back-end photonics for silicon-based integrated photonic platform

Koji Yamada

Not Accessible

Your library or personal account may give you access

Abstract

Advanced functionality integration using add-on waveguide systems on a silicon photonic platform is reviewed. The add-on waveguide systems, made of silicon-rich silica, silicon oxynitride, silicon nitride and amorphous silicon, are constructed by back-end-on-line (BEOL) process technologies.

© 2015 Optical Society of America

PDF Article
More Like This
Back-End Integration of Multilayer Photonics on Silicon

Shiyang Zhu and Guo-Qiang Lo
Th1F.1 Optical Fiber Communication Conference (OFC) 2015

Integrated Photonic Devices and Circuits in Multilayer Silicon Nitride-on-Silicon Platforms

Joyce K. S. Poon, Wesley D. Sacher, Ying Huang, and Guo-Qiang Lo
Th3F.1 Optical Fiber Communication Conference (OFC) 2015

Supercontinuum Generation in Bandgap Engineered Silicon Rich Nitride Waveguides – a New Back-End CMOS Compatible Nonlinear Optics Platform

Ting Wang, Doris K. T. Ng, Siu-Kit Ng, Yeow-Teck Toh, A. K. L. Chee, George F. R. Chen, Qian Wang, and Dawn T.H. Tan
NTu1A.1 Nonlinear Optics (NLO) 2015

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use