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Conferences > ACPC > 2018 > Su1F > Su1F.4
  • Asia Communications and Photonics Conference (ACP) 2018
  • OSA Technical Digest (Optica Publishing Group, 2018),
  • paper Su1F.4

Temperature sensitivity enhancement for silicon-based Mach-Zehnder interferometer with single- mask design

Yang Zhang, Jun Zou, and Jian-Jun He

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Abstract

We propose a sensitivity-enhanced temperature sensor using a Mach-Zehnder Interferometer (MZI) on silicon-on-insulator (SOI) platform, with the sensitivity as high as 438pm/°C. The sensor is fabricated only by a single mask without any polymer cladding.

© 2018 The Author(s)

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