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  • Asia Communications and Photonics Conference (ACPC) 2019
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper M3D.1

Tunable index silicon nitride for extended silicon photonics applications

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We demonstrate PECVD based silicon nitride materials for range of applications. These applications are for non-linear functionalities in the C band, coarse wavelength division multiplexing in the O band and a 1-micron thick SiN waveguiding platform at 2 microns demonstrating filters and trimming capabilities.

© 2019 The Author(s)

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