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Conferences > ACPC > 2019 > M4A > M4A.234
  • Asia Communications and Photonics Conference (ACPC) 2019
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper M4A.234

Low mode volume Bow-Tie Shaped Photonic Crystal Nanobeam Cavity in Silicon

Jun Zhou, Jiajiu Zheng, Zhuoran Fang, Peipeng Xu, and Arka Majumdar

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Abstract

We design and fabricate a bow-tie shaped photonic crystal cavity on a silicon-on-insulator (SOI) platform. A high quality factor of 1×104 in the fabricated devices and an ultra-low mode volume of ~0.1(λ/nSi)3 are achieved.

© 2019 The Author(s)

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