Efficient Silicon Nitride Grating Coupler with Silicon Reflector at Near-Infrared Wavelengths

Min Liu; Min Liu; Daigao Chen; Daigao Chen; Xiao Hu; Xiao Hu; Peng Feng; Peng Feng; Xi Xiao; Xi Xiao

doi:10.1364/ACPC.2020.M4A.166

Asia Communications and Photonics Conference/International Conference on Information Photonics and Optical Communications 2020 (ACP/IPOC)
OSA Technical Digest (Optica Publishing Group, 2020),
paper M4A.166
•https://doi.org/10.1364/ACPC.2020.M4A.166

Efficient Silicon Nitride Grating Coupler with Silicon Reflector at Near-Infrared Wavelengths

Min Liu, Daigao Chen, Xiao Hu, Peng Feng, and Xi Xiao

Asia Communications and Photonics Conference 2020

Beijing China
24–27 October 2020
ISBN: 978-1-943580-82-8

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M. Liu, D. Chen, X. Hu, P. Feng, and X. Xiao, "Efficient Silicon Nitride Grating Coupler with Silicon Reflector at Near-Infrared Wavelengths," in Asia Communications and Photonics Conference/International Conference on Information Photonics and Optical Communications 2020 (ACP/IPOC), K. Xu, D. Simeonidou, C. Chang-Hasnain, N. Wada, X. Ren, Z. Zhukov, P. Perry Shum, Y. Ji, J. Zhang, X. Zhou, C. Lu, and L. Wosinska, eds., OSA Technical Digest (Optica Publishing Group, 2020), paper M4A.166.

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Abstract

A high efficiency double layer grating coupler at near-infrared wavelengths is proposed for the first time. The experimental peak coupling efficiency and 1-dB bandwidth of the grating coupler are 2.78 dB and 32 nm, respectively.

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