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Silicon Nitride Optical Phased Arrays with Large Beam Steering Range and Small Divergence Angle

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Abstract

In this work, we demonstrate a 1024-channel grating-based antennas phased array fabricated on silicon nitride platform. The beam steering angle range can reach to 56from 635 nm to 1064 nm in the longitudinal direction while the divergence angle is only 0.023°.

© 2021 The Author(s)

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