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Conferences > ACPC > 2021 > T4A > T4A.182

Investigation and optimization of sidewall angle impact for thin film lithium niobate grating couplers

Jiacheng Liu, Jiangbing Du, Minni Qu, and Zuyuan He

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Abstract

We investigated the impact of the sidewall angle on the performance of a grating coupler on thin film lithium niobate. The optimization is experimentally validated with a grating coupler fabricated by focus ion beam etching.

© 2021 The Author(s)

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