Abstract

Microspectrometers based on MEMS Fabry-Pérot (FP) interferometers as optical band-pass filters are a recently emerging solution. InfraTec is one of the leading suppliers of tunable infrared MEMS filters for gas analysis. Different FP filters for the wavelength range 3-11 µm were designed and fabricated. The FP reflector thin film design based on conventional optical thin films was introduced to cover the whole MWIR and LWIR range. Beside this, a completely new so-called Dual-Band design has been developed, in which the 1st interference order in the LWIR and the 2nd order in the MWIR can be used simultaneously. To compensate temperature drift and stabilize sensitivity against vibration two different solutions were engineered. Furthermore FP filters of higher orders are developed to decrease the spectral bandwidth up to 20 nm in the MWIR. Combined with PbSe detectors fast tunable FP devices have been created with both a high signal-to-noise ratio and a high spectral resolution for the detection of hydrocarbons.

© 2016 Optical Society of America

PDF Article
More Like This
SOA-Based Tunable Fiber Ring Laser With Intracavity MEMS-Tunable Fabry-Pérot Filter

M. T. Haidar, E. Polat, S. Paul, J. Cesar, C. Gierl, A. Chipouline, and F. Küppers
SM2P.7 CLEO: Science and Innovations (CLEO_SI) 2016

MEMS Fabry-Perot Interferometer Based Spectral Sensors for Industrial Applications

Anna Rissanen, Claudio Avila, Bin Guo, Uula Kantojärvi, Matti Tammi, Richard Bourne, and Frans Muller
ATu1A.1 Applied Industrial Optics: Spectroscopy, Imaging and Metrology (AIO) 2017

Analysis and Fabrication of Fabry-Perot Interferometer Filters Using MEMS Technology

Srihari P. Sankisa, Banmali S. Rawat, and Moncef B. Tayahi
LWJ6 Laser Science (LS) 2007