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Sub-10-nm-resolution Grayscale Printing of Optical Metasurface using Light-controlled Capillary Force Lithography

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Abstract

By applying optical control to nanoscale capillary effect, we realize grayscale printing of polymer nanopixels with a sub-10-nm vertical resolution. Through spatial modulation of the control-light, we print various grayscale optical metasurfaces on-demand.

© 2021 The Author(s)

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