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Conferences > AIS > 2020 > ATu4I > ATu4I.7

Recent Applications and Automated Operations of FTIR- based Continuous Process Monitors (FTIR-CPMs) within Semiconductor Factories

Curtis T. Laush

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Abstract

This presentation outlines the recent application of OEM-style Fourier Transform InfraRed (FTIR) interferometers as fully automated, semiconductor wafer and substrate panel chemical process emissions (and point-of-use abatement) monitors within cleanrooms.

© 2020 The Author(s)

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