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Optica Publishing Group
  • Asia Optical Fiber Communication and Optoelectronic Exposition and Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper SaH2
  • https://doi.org/10.1364/AOE.2008.SaH2

Optimization of nanoscale silicon waveguide fabrication

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Abstract

A simple and effective technique was developed to improve the nanoscale silicon waveguide fabrication. 40 nanometer features with smooth and vertical sidewall are demonstrated. With this technique, nanoscale silicon grating coupler was obtained.

© 2008 Optical Society of America

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