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  • Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper JTuC3
  • https://doi.org/10.1364/AOPT.2009.JTuC3

Open-loop shaping of a 4K MEMS with Fourier-domain pre-compensation

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Abstract

We describe a computationally efficient Fourier-domain algorithm for influence function compensation and an improved voltage-phase calibration technique that together enable precise open-loop shaping of a 64 × 64 MEMS deformable mirror.

© 2009 Optical Society of America

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