Abstract
Pulsed lasers are used for sub micron scale fabrication. We employ adaptive optics for correction of focal depth induced aberrations and beam shaping. Adaptive multispot schemes are used for rapid parallel fabrication.
© 2011 Optical Society of America
PDF ArticleMore Like This
P. S. Salter, H. Al-Wakeel, A. Jesacher, and M. J. Booth
FTuM3 Frontiers in Optics (FiO) 2011
Patrick Salter, Alexander Jesacher, Richard Simmonds, and Martin Booth
JMG1 CLEO: Applications and Technology (CLEO:A&T) 2011
Richard D. Simmonds, Alexander Jesacher, Tony Wilson, and Martin J. Booth
JMG2 CLEO: Applications and Technology (CLEO:A&T) 2011