Tunable Single Pixel MEMS Fabry-Perot Interferometer

Annette Rivas; John Kerekes; Alan Raisanen

doi:10.1364/AOPT.2011.JWA15

Imaging and Applied Optics
OSA Technical Digest (CD) (Optica Publishing Group, 2011),
paper JWA15
•https://doi.org/10.1364/AOPT.2011.JWA15

Tunable Single Pixel MEMS Fabry-Perot Interferometer

Annette Rivas, John Kerekes, and Alan Raisanen

Adaptive Optics: Methods, Analysis and Applications 2011

Toronto Canada
10–14 July 2011
ISBN: 978-1-55752-914-5

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Joint FTS/HISE/AO/COSI Poster Session (JWA)

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A. Rivas, J. Kerekes, and A. Raisanen, "Tunable Single Pixel MEMS Fabry-Perot Interferometer," in Imaging and Applied Optics, OSA Technical Digest (CD) (Optica Publishing Group, 2011), paper JWA15.

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Abstract

Typically, MEMS Fabry Perot devices use electrostatic actuation to control mirror spacing and snap in is an issue. A thermally actuated device has been modeled in COMSOL that lifts the mirror through thermal expansion.

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