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Conferences > ASSL > 2015 > AM5A > AM5A.3

Nano particle production by laser ablation and metal sputtering on Si-Wafer substrate

Mohammad Hossein Azhdast, Ghassem Azdasht, Heinrich Lüdeke, Klaus-Dieter Lang, and Veronika Glaw

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Abstract

This research relates to methods of deposition and patterning a surface with nano sputtered particles by Laser. The method is mask-less and without vacuum requirement which can be used in wire bonding and microelectronics devices.

© 2015 Optical Society of America

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