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Frequency-quadrupled Nd-doped fiber laser source in the deep-UV at 226 nm

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Abstract

We present the first demonstration of a laser source at 226nm based on the frequency-quadrupling of an all-PM Nd-doped fiber laser. The DUV laser delivers 175mW of average power, 50ns pulse at 30kHz repetition rate.

© 2020 The Author(s)

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