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Efficient Nonlinear Frequency Conversion to 193-nm Using Cooled BBO

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Abstract

We have developed a 193-nm laser source operating at 5-kHz that generates a near-diffraction-limited TEM00 beam with 35 mW average power. The conversion efficiency and stability are both significantly enhanced by cooling the BBO crystal used in the final sum-frequency mixing stage.

© 2007 Optical Society of America

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