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Conferences > ASSP > 2008 > WE > WE37

High Repetition and High Average Power Nd:YAG Laser for EUV Lithography

Hisanori Fujita, Masahiro Nakatsuka, Ravi Bhushan, Koji Tsubakimoto, Hidetsugu Yoshida, Noriaki Miyanaga, and Yasukazu Izawa

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Abstract

We have been developing a high repetition (5–100 kHz) and high power Nd: YAG laser system pumped by cw LDs. Average power of 4.6 kW was obtained at 28.8 kW of pumping power.

© 2008 Optical Society of America

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