A sub-Watt, line-narrowing, 193-nm solid state laser operating at 6 kHz with KBBF for injection-locking ArF excimer laser systems

Shinji Ito; Takashi Onose; Kouji Kakizaki; Takashi Matsunaga; Junichi Fujimoto; Hakaru Mizoguchi; Shuntaro Watanabe; Chun Zhou; Teruto Kanai; Yohei Kobayashi; Chuangtian Chen; Xiaoyang Wang

doi:10.1364/ASSP.2012.AT4A.7

Lasers, Sources, and Related Photonic Devices
OSA Technical Digest (CD) (Optica Publishing Group, 2012),
paper AT4A.7
•https://doi.org/10.1364/ASSP.2012.AT4A.7

A sub-Watt, line-narrowing, 193-nm solid state laser operating at 6 kHz with KBBF for injection-locking ArF excimer laser systems

Shinji Ito, Takashi Onose, Kouji Kakizaki, Takashi Matsunaga, Junichi Fujimoto, Hakaru Mizoguchi, Shuntaro Watanabe, Chun Zhou, Teruto Kanai, Yohei Kobayashi, Chuangtian Chen, and Xiaoyang Wang

Advanced Solid-State Photonics 2012

San Diego, California United States
29 January–1 February 2012
ISBN: 978-1-55752-933-6

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ASSP Poster Session 2 (AT4A)

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S. Ito, T. Onose, K. Kakizaki, T. Matsunaga, J. Fujimoto, H. Mizoguchi, S. Watanabe, C. Zhou, T. Kanai, Y. Kobayashi, C. Chen, and X. Wang, "A sub-Watt, line-narrowing, 193-nm solid state laser operating at 6 kHz with KBBF for injection-locking ArF excimer laser systems," in Lasers, Sources, and Related Photonic Devices, OSA Technical Digest (CD) (Optica Publishing Group, 2012), paper AT4A.7.

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Abstract

We present a line-narrowing 193-nm solid state laser with a KBBF prism-coupled device. This laser delivers an output power of 0.2 W at a repetition rate of 6 kHz.

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