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Efficient ultra-broadband XUV output coupler

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Abstract

We designed and manufactured an XUV output coupler (OC) for applications in enhancement cavities. The concept relies on grazing incidence geometry and allows for a reflectivity of more than 40 % in the spectral range 20-120 nm, as well as ultra-low losses <0.05 % for the fundamental 1.03 µm radiation.

© 2012 Optical Society of America

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