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Hybrid Silicon Nitride-Thin Film Lithium Niobate Based Efficient Grating Coupler

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Abstract

An alternate way of designing a grating coupler on X cut thin film LNOI-Si3N4 based platform is proposed considering the contamination and fabrication issues in CMOS fabrication facility. The coupling efficiency of 44% at 1550nm and 3dB bandwidth of 45nm is obtained for X cut Y propagation Lithium Niobate.

© 2022 The Author(s)

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