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Tunable ultrahigh spectral brightness ArF* excimer laser source

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Abstract

Rare gas halide excimer sources have proved to be powerful and versatile tools in the study of multiphoton processes. In this context the development of excimer laser systems has centered on the extraction of energy in narrow-bandwidth diffraction- limited beams, as this is essential for achieving high spectral brightness.

© 1981 Optical Society of America

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