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Investigation of laser desorption by secondary ion mass spectroscopy

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Abstract

The desorption of molecular species on metal surfaces by pulsed laser radiation is examined for the first time with secondary ion mass spectroscopy (SIMS). SIMS has a surface sensitivity of <10-4 monolayer1,2 due to the moderately efficient production of charged secondary ions coupled with the high ion collection efficiency and high detector gain of quadrupole mass spectrometers. When a very low primary ion current is used (<50 nA), the presence of specific molecular adsorbed species such as hydrocarbons and water can be continually monitored without significantly changing surface composition.3 This static form of SIMS can thus reveal laser-induced changes in the surface com- position. When the dynamics of laser-induced surface processes are of interest, time-resolved SIMS can be performed by rapidly sweeping a quadrupole mass filter before and after the laser is triggered.

© 1983 Optical Society of America

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